Round Magnetron Sputter Source(Circular Flat Magnetron)

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Description:

Target Diameter:4, 6, 8, 10, 12 inches,
Electrode: M8 stud,7/16 connector or copper stud,
Mounting Type: Internal-mount, External-mount,
Cooling Design: Direct cooling,Indirect cooling,
Magnet strength: standard, strong.

Magnet field type: Balanced, Unbalanced, High Yield, High Sputter Rate

Power Supply Unit: DC/Pulsed-DC/MF/RF/HiPIMS

Specifications:

Model: DST-CEM300
Exterior Dimension: 370mmx417mm
Target size: 10 inches
Electrode: M8 studs, 7/16 connector or copper stud available
Cooling type: direct water cooling or indirect water cooling
Motor: Siemens Servo Motor(other brand available)
Magnet rotary speed:Max. 400RPM
Without gas distribution

Water Cooling Fittings:

Cathode:12x8 PU tube, 1x in, 1x out;
Anode:12x8 PU tube, 1x in, 1x out;

Installation Requirements:

Cold water Temp.: 18-22°C
Water Pressure: < 3KG/cm2
Water flow rate: >1.5L/min/KW